
1.需求高效經(jīng)濟的清洗專用設備
1. Demand for efficient and economical cleaning specialized equipment
伴(bàn)隨著超聲波清(qīng)洗設備的應用範(fàn)圍拓展,超聲波清洗設(shè)備麵對(duì)新科技急需創(chuàng)新。針(zhēn)對新技術,新材料,新產品的湧現,設計專(zhuān)用超聲波清洗設備應該具有(yǒu):優異的性(xìng)價比,與其(qí)他(tā)清洗(xǐ)方式能高效組合,有一定的自動化程度。
With the expansion of the application scope of ultrasonic cleaning equipment, there is an urgent need for innovation in the face of new technologies. In response to the emergence of new technologies, materials, and products, the design of specialized ultrasonic cleaning equipment should have: excellent cost-effectiveness, efficient combination with other cleaning methods, and a certain degree of automation.
2.發展超聲波碳氫真空清洗設備
2. Develop ultrasonic hydrocarbon vacuum cleaning equipment
環境保護是我國的一(yī)項基本國策,清洗行(háng)業(yè)以前所沿用的ODS有機溶劑被(bèi)禁止,因此,需要研發使用(yòng)非ODS溶劑的新型(xíng)清洗設備。經濟環保的碳氫溶劑超聲波清洗設備凸顯其優越性能。由於碳氫溶劑閃點低,限製了其在超(chāo)聲波清洗方麵的作用。在引入超聲波碳氫真空清洗技術後,不僅達到了(le)安全環保的目的,而且在真空(kōng)狀態下(xià)進行超聲波碳氫清洗還強化了潔淨功能(néng),大理發展(zhǎn)碳氫真空清(qīng)洗已成為今後環(huán)保型超聲波清洗的發展方向。
Environmental protection is a fundamental national policy in China, and the use of ODS organic solvents in the cleaning industry has been banned. Therefore, it is necessary to develop new cleaning equipment that uses non ODS solvents. The economic and environmentally friendly hydrocarbon solvent ultrasonic cleaning equipment highlights its superior performance. Due to the low flash point of hydrocarbon solvents, their effectiveness in ultrasonic cleaning is limited. After the introduction of ultrasonic hydrocarbon vacuum cleaning technology, not only has the goal of safety and environmental protection been achieved, but ultrasonic hydrocarbon cleaning under vacuum has also strengthened the cleaning function. The development of hydrocarbon vacuum cleaning in Dali has become the future direction of environmentally friendly ultrasonic cleaning.
3.研發高頻超聲波清洗設備
3. Develop high-frequency ultrasonic cleaning equipment
目前工業上大量使用的為低中(zhōng)頻段的超聲波清洗(xǐ)機,也即20~50KHZ頻段(duàn),而(ér)現在急需研發(fā)0~200KHZ高頻(pín)以(yǐ)及(jí)兆赫級(jí)超聲(shēng)波清洗設備。
At present, the widely used ultrasonic cleaning machines in industry are in the low to medium frequency range, which is the 20-50KHZ frequency band. However, there is an urgent need to develop high-frequency and megahertz ultrasonic cleaning equipment in the 0-200KHz range.

兆赫級超(chāo)聲波清洗技術(shù)有以下的主要優點:一是避免對器件表麵清(qīng)洗時帶來損傷,而是更加精準地(dì)去除附著在器件表麵的(de)亞微米級的汙(wū)垢。
The megahertz ultrasonic cleaning technology has the following main advantages: firstly, it avoids damage to the surface of the device during cleaning, and more accurately removes submicron scale dirt attached to the surface of the device.
兆(zhào)赫級超(chāo)聲波清洗設備目(mù)前已經存在(zài),產品(pǐn)主要來自國外,我(wǒ)國研製的兆赫級超聲波清洗設(shè)備還未從實驗室走向工程應用。兆赫級超聲波清洗設備主(zhǔ)要應用在半導體生產線(xiàn),用於對100~300mm矽片(piàn)的清洗,既可以出去矽片(piàn)表麵0.15μm的顆粒,又可以組織漂(piāo)洗過程中(zhōng)顆粒的重新附著。可見,兆赫級超聲波清(qīng)洗設備(bèi)已經是大規模集成電路製造生產過程中必不(bú)可少的。
The megahertz level ultrasonic cleaning equipment currently exists, and the products mainly come from abroad. The megahertz level ultrasonic cleaning equipment developed in China has not yet moved from the laboratory to engineering applications. The megahertz level ultrasonic cleaning equipment is mainly used in semiconductor production lines for cleaning 100-300mm silicon wafers. It can remove particles of 0.15 μ m on the surface of the silicon wafer and organize the reattachment of particles during the rinsing process. It can be seen that megahertz level ultrasonic cleaning equipment is essential in the large-scale integrated circuit manufacturing process.
4.開拓超聲波(bō)清洗特殊應(yīng)用
4. Explore special applications of ultrasonic cleaning
超聲波清洗通常是對(duì)零部件的清洗,隨著工藝的不斷完善,出現了一些特殊應用,如超聲波防(fáng)垢在線清洗等。超聲波防垢清洗主要(yào)是利用超聲波強聲場處(chù)理流體,使流體中成垢物質在超聲場的作用下,其物理形(xíng)態和化(huà)學(xué)性能發生(shēng)一係列的變化,使之分散、粉碎、鬆散、鬆脫而不易附著管、器壁(bì)形成積垢。超聲波強聲場處理流體(tǐ)不(bú)僅有防垢的作用,而且能(néng)加快液體(tǐ)表麵傳熱速率,提高液(yè)體的傳熱效率,這些新應用的出現更大地發揮了超聲波(bō)清洗的功能,近年(nián)來,雷士超聲波設備廠在開拓超(chāo)聲波應用新領域方麵做出了極大(dà)貢獻。
Ultrasonic cleaning is usually used to clean components. With the continuous improvement of the process, some special applications have emerged, such as ultrasonic anti scaling online cleaning. Ultrasonic anti scaling cleaning mainly uses ultrasonic strong sound field to treat fluids, causing a series of changes in the physical form and chemical properties of scaling substances in the fluid under the action of ultrasonic field, making them dispersed, crushed, loose, and less likely to adhere to pipes and walls to form scaling. Ultrasonic strong sound field treatment of fluids not only has anti scaling effect, but also can accelerate the heat transfer rate on the liquid surface and improve the heat transfer efficiency of the liquid. The emergence of these new applications has greatly enhanced the function of ultrasonic cleaning. In recent years, Leishi Ultrasonic Equipment Factory has made great contributions in exploring new fields of ultrasonic applications.
5.超聲波清洗設備(bèi)智能(néng)化(huà),集成化
5. Intelligent and integrated ultrasonic cleaning equipment
隨著工業產品向微(wēi)型化、智能(néng)化、壽命長、高可靠(kào)性發展(zhǎn),在“互聯網+製造”的大變局中,超聲波清洗技術也與時俱進,在工業生產與社會生(shēng)活的許多方麵,都(dōu)有它活(huó)躍的舞台。將(jiāng)各種新型處理器(qì)逐漸(jiàn)應用到(dào)超聲波電源中,使整個超聲波係統具有優(yōu)良(liáng)穩定(dìng)性、可(kě)靠性,並可集成多種功能,如頻率跟蹤、故(gù)障(zhàng)在線(xiàn)檢測、遠程控製、組網集中(zhōng)控(kòng)製等。
With the development of industrial products towards miniaturization, intelligence, long life and high reliability, ultrasonic cleaning technology also keeps pace with the times in the great change of "Internet plus manufacturing". It has an active stage in many aspects of industrial production and social life. Gradually applying various new processors to ultrasonic power supplies, the entire ultrasonic system has excellent stability and reliability, and can integrate multiple functions such as frequency tracking, online fault detection, remote control, and centralized network control.
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